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Growth of ZnO Films on R-Plane Sapphire Substrates by Atmospheric-Pressure Chemical Vapor Deposition Using Zn Powder And H2O As Source Materials

Films of ZnO have been grown on R-plane sapphire substrates by atmospheric-pressure chemical vapor deposition (AP-CVD) using Zn powder and H2O as source materials. Variation in growth rate as a function of substrate temperature can be divided into three regions: re-evaporation region, mass transport controlled region, and surface controlled region. Scanning electron microscope observations revealed that the surface morphology of the film is dependent not only on substrate temperature but also on Zn source and H2O source temperatures. X-ray diffraction patterns of most of the films showed a dominant peak, indicating highly A-axis oriented growth. A single crystalline A-plane ZnO film without mixed domain was successfully grown by optimizing the growth condition. Visible region photoluminescence changed from orange-red emission to blue-green emission systematically by adjusting Zn source and H2O source temperatures. This result suggests the possibility of defect control in our AP-CVD system. For the films grown at TS=700 °C in the mass transport controlled region, resistivity decreased from 0.45 to 0.007 Ω cm as TH2O rised from 54 to 75 °C.

Vertically aligned ZnO nanonails have been successfully grown on annealed sapphire substrates at comparatively high gas pressure using catalyst-free nanoparticle-assisted pulsed-laser ablation deposition (NAPLD). The growth behavior of the ZnO nanonails has been investigated by variation of the ablation time, which we name ‘isolated particle initiated growth’ and a three-step growth mechanism for ZnO nanonails is proposed. SEM analysis reveals that each of the uniquely shaped ZnO nanonails consists of a so-called hexagonal rod-shaped ‘root’ and a slightly tapered ‘stem’. The well-aligned ZnO nanonails exhibit a strong ultraviolet (UV) emission at around 390 nm under room temperature and only negligible visible emission, which indicates that there is a very low concentration of oxygen vacancies in the highly oriented ZnO nanonails. The as-synthesized nanonail arrays on sapphire substrate could offer novel opportunities for both fundamental research and technological applications.


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