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Sapphire Dan Changjing Furnace Vacuum System Structure

The utility model relates to a Sapphire Dan Changjing furnace vacuum system, which includes a vacuum pipe, connected to a vacuum line I Sapphire Dan Changjing Furnace, the lower end of the vacuum pipe I passed molecular pump over six composite molecular pump  is connected to said vacuum line I took over six and molecular pump disposed between the rotary flapper valve , the molecular pump over six and compound molecular pump 8 through the caliper fixing screws , the said compound molecular pump  is connected to the lower end of a vacuum exhaust outlet pipe, the vacuum evacuation outlet duct  is provided with a first solenoid valve, said first solenoid valve  rear vacuum outlet pipe and the vacuum evacuation exhaust pipe is connected between the I-pass line, the exhaust bypass conduit is provided with a second solenoid valve.

Vacuum channel, and interface installed on a variety of instruments, the second solenoid valve for opening and closing the bypass exhaust line, line of the exhaust bypass the initial operation for the vacuum system is a sapphire crystal growth furnace pre-vacuum, vacuum up to a certain degree before open complex molecular pump, the rotary flapper valve for opening and closing the vacuum pumping system, rotary flapper valve four small, can Overall into housing, increase the overall beauty of the molecular pump over six fixed rotary flapper valve and the composite molecular pump, and role in the transition from the interface. The composite molecular pump for improving the vacuum pump capacity, the rated working vacuum requirements. Evacuation of the vacuum outlet pipe for connecting the vacuum system and vacuum pump.


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