Vacuum System of Sapphire Crystal Growth Furnace
- Details
- Category: Molybdenum & Sapphire Growth Furnace News
- Published on 20 November 2013
- Written by Cloudy
- Hits: 381
The utility model relates to a vacuum system of a sapphire crystal growth furnace. The vacuum system 
comprises a vacuum pipeline connected to a sapphire crystal growth furnace body, and is characterized in that the lower end of the vacuum pipeline is connected with a compound molecule pump through a molecular pump connection pipe; a rotation type gate valve is arranged between the vacuum pipeline and the molecular pump connection pipe; the lower end of the compound molecule pump is connected with a vacuum outlet air exhaust pipeline; a first electromagnetic valve is arranged on the vacuum outlet air exhaust pipeline; an air exhaust bypass pipeline is connected between the vacuum outlet air exhaust pipeline and the vacuum pipeline which are arranged behind the first electromagnetic valve; and a second electromagnetic valve is arranged on the air exhaust bypass pipeline. The vacuum system has the advantage that the stable operation of the sapphire crystal growth furnace system can be ensured.
A method Sapphire Dan Changjing furnace vacuum system comprising vacuum channel, said vacuum channel is connected to the sapphire Dan Changjing furnace body, characterized in that the vacuum channel through the lower end of the molecular pump tube is connected to multiplex molecular pump, said vacuum channel and molecular pump tube is disposed between the rotary gate valve, said composite molecular pump lower outlet connected to a vacuum suction pipe, said vacuum exhaust outlet pipe is provided with a first solenoid valve, said first solenoid valve behind the vacuum outlet exhaust pipe and the vacuum line is connected between the exhaust bypass duct, said exhaust bypass conduit is provided with a second solenoid valve.
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