ALD Growth of Cobalt–Molybdenum Oxide Films
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- Category: Molybdenum knowledge
- Published on 28 July 2013
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Cobalt molybdenum compounds are important catalytic materials in many processes, e.g. in splitting of ammonia to form CO free hydrogen fuel.
The growth dynamics have been investigated using quartz crystal microbalance (QCM) methods. It is evident that mixing of the different precursor chemistries affect the growth patterns.
When water is introduced to the reactions, a surface controlled mechanism takes place which guides the deposited stoichiometry towards the CoMoO4 phase over a wide range of cobalt rich pulsed compositions.
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